Semiconductor

Wafer inspection machine

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Device parameters:

· Capacity: ≥ 8ppm;

· Accuracy rate: ≥ 95%;

· Utilization rate: ≥ 95% (caused only by the equipment itself);

· Missing detection rate: 0;

· False detection rate: ≤ 5%;


Installation environment requirements:

· Power requirement: 380VAC, 50Hz ≤40KW;

· Compressed air source: 0.4~0.7MPa ≤1000L/H;

· Ambient temperature: room temperature +10°~+45°;

· Relative humidity: ≯50%, no condensation, no corrosive, flammable gas.

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